Vacuum process apparatus and method of operating the same

ABSTRACT

A vacuum process apparatus includes a plurality of cassettes for holding samples, a transporter which transports the samples, a plurality of vacuum process chambers each for processing samples one by one, an evacuator which evacuates the vacuum process chambers, and a load chamber and an unload chamber communicating with the vacuum process chambers. An apparatus controller is provided for controlling transporting and processing of the samples. The apparatus controller measures a time period for transporting each of the samples and a processing time period for processing a sample in each of the vacuum process chambers, and determines a next order of extraction of the samples from the plurality of cassettes based on the measured time periods.

CROSS REFERENCE TO RELATED APPLICATION

This is a continuation of U.S. application Ser. No. 09/526,206, filedMar. 15, 2000, now U.S. Pat. No. 6,745,093, the subject matter of whichis incorporated by reference herein.

BACKGROUND OF THE INVENTION

The present invention relates to a vacuum process apparatus comprising acontrol means for determining an order of loading samples of the vacuumprocess apparatus having a plurality of process chambers and a method ofoperating the vacuum process apparatus. More particularly, the inventionrelates to a vacuum process apparatus and a method of operating thevacuum process apparatus, which can improve the efficiency of processingsamples in the operation of parallel processes using a plurality ofprocess chambers.

A vacuum process apparatus having a control means for determining theorder of loading samples into a plurality of process chambers isdisclosed in Japanese Patent Application Laid-open No. 10-189687. Thisvacuum process apparatus has a system connecting a plurality of processchambers in which process scheduling is performed based on a priorityorder of the samples to be processed.

Further, a vacuum process apparatus for performing processing inparallel using a plurality of process chambers is disclosed in JapanesePatent Application Laid-open No. 63-133532. In a case where processingis performed in the vacuum process apparatus of a system connecting aplurality of process chambers to a transfer chamber in parallel, samplesare loaded in the order of loading samples to the two process chambersso that the numbers of the samples from two sample cassettes becomeequal to each other.

In the case where processing is performed in a plurality of processchambers in parallel, since the processing time will not always be equalin all of the process chambers, even if samples are loaded in the orderof loading samples to the two process chambers so that the numbers ofthe samples from two sample cassettes become equal to each other, thereis a problem in that useless waiting time occurs in loading the samplesinto the process chambers.

SUMMARY OF THE INVENTION

An object of the present invention is to provide a vacuum processapparatus with the aim of improving the efficiency of sample processingin the overall vacuum process apparatus in operation of parallelprocessing using a plurality of process chambers and a method ofoperating the vacuum process apparatus.

In order to attain the foregoing object, the present invention ischaracterized by a vacuum process apparatus comprising a plurality ofcassettes for containing samples; a transporting means for transportingsaid samples; a plurality of vacuum process chambers each for processingsaid samples one by one; an evacuation means for evacuating said vacuumprocess chambers; a load chamber and an unload chamber communicatingwith said vacuum process chambers; and an apparatus control means forcontrolling transporting and processing of said samples,

wherein

said apparatus control means measures a time period during which each ofsaid samples is transported and a processing time period in each of saidvacuum process chambers, and determines the next extracting order ofsaid samples from said plurality of cassettes based on said measuredtime periods.

Another feature of the present invention involves provision of a vacuumprocess apparatus comprising a plurality of cassettes for containingsamples; a transporting means for transporting said samples; a pluralityof vacuum process chambers each for processing said samples one by one;an evacuation means for evacuating said vacuum process chambers; a loadchamber and an unload chamber communicating with said vacuum processchambers; and an apparatus control means for controlling transportingand processing of said samples, wherein

said apparatus control means calculates a required time until completionof preparation of the start of processing of a newly loaded sample usinga time period of sample loading to and a time period of sample unloadingfrom each of said vacuum process chambers, and a processing time periodof each of the samples, and loads a sample from a cassette correspondingto a vacuum process chamber having the shortest required time among saidvacuum process chambers to said vacuum process chamber.

Another feature of the present invention involves provision of a vacuumprocess apparatus comprising a plurality of cassettes for containingsamples; a transporting means for transporting said samples; a pluralityof vacuum process chambers each for processing said samples one by one;an evacuation means for evacuating said vacuum process chambers; a loadchamber and an unload chamber communicating with said vacuum processchambers; and an apparatus control means for controlling transportingand processing of said samples, wherein said apparatus control meanscomprises:

a transporting and processing time measuring means for measuring andcalculating a time period of sample loading to and a time period ofsample unloading from each of said vacuum process chambers, and a sampleprocessing time period in each of said vacuum process chambers;

a sample processing waiting time estimating means for calculating andestimating a required time until completion of preparation of the startof processing of a newly loaded sample using said time period of sampleloading to and said time period of sample unloading from and said sampleprocessing time period in each of said vacuum process chambers;

a sample processing order determining means having a function todetermine a next extracting order of said samples based on data on saidtime period of sample loading to and said time period of sampleunloading from and said waiting time period obtained; and

a sample transporting and processing control means having a function tocontrol the overall vacuum process apparatus so as to perform sampleprocessing and sample transporting based on the result determined bysaid sample processing order determining means.

The vacuum process apparatus in accordance with the present inventionselects a vacuum process chamber among the plurality of vacuum processchambers which has the shortest required time period from completion ofsample processing under way now to completion of preparation to load anew sample. That is, in the vacuum process apparatus performingprocessing in parallel using a plurality of vacuum process chambers, inorder to shorten the waiting time period until loading of a sampletransported to the vacuum process apparatus into the vacuum processchamber, it is necessary to select a vacuum process chamber among theplurality of vacuum process chambers which has the shortest requiredtime period from completion of sample processing under way now tocompletion of preparation to load a new sample.

According to the vacuum process apparatus in accordance with the presentinvention, the order of processing samples is determined by taking thewaiting time period into consideration. Therefore, the sample processingefficiency can be improved because a vacuum process chamber seriescapable of fast processing can process second and third samples, while aprocess chamber series of slow processing is processing a first sample.

According to the vacuum process apparatus in accordance with the presentinvention, the waiting time period in the vacuum process apparatus canbe minimized. Further, it is possible to shorten the time period fromextracting a sample from a sample cassette and performing processing toreturning the sample to the cassette.

Furthermore, since the time period for completing processing for eachsample can be shortened, the processing time period for one samplecassette can be shortened.

Still further, by shortening the time period of processing for a firstsample cassette, the timing to start processing of a second samplecassette can be made earlier. Therefore, there is an effect in that itis possible to improve the sample processing efficiency of the overallvacuum process apparatus per unit time.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a diagram showing an example of the system structure of avacuum process apparatus to which the present invention is applied.

FIG. 2 is a diagram showing an example of a functional structure of theapparatus control means of FIG. 1.

FIG. 3(A) and FIG. 3(B), when combined, provide a flowchart showingprocess operation of calculating sample processing and transportingtime.

FIG. 4(A) and FIG. 4(B), when combined, provide a flowchart of waitingtime estimation processing which calculates a required time period untilstarting of processing in each process chamber.

FIGS. 5(A) and 5(B) are flowcharts showing the sequences oftransportation and processing of a sample, respectively.

FIG. 6 is a chart showing timing of sample processing in a case of asample loading procedure in accordance with the present invention.

FIG. 7 is a chart showing timing of sample processing in a case of asample loading procedure in the prior art.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

An embodiment of the present invention will be described below withreference to the drawings. FIG. 1 shows an example of the systemstructure of a vacuum process apparatus to which the present inventionis applied. The vacuum process apparatus of FIG. 1 comprises fourprocess chambers 8 to 11, representing a first process chamber to afourth process chamber, and three sample cassettes 1 to 3. A samplecontained in the sample cassette 2 or the sample cassette 3 is extractedby an atmospheric transporting robot 4 and is transported to a load lockchamber 6 through an orientation flat adjusting unit 5. The load lockchamber 6 is capable of communicating with a vacuum transporting chamber13 in a vacuum state by switching between the atmospheric state and avacuum state. In the vacuum transporting chamber 13, a sample in theload lock chamber 6 is transported to any one of the process chambers 8to 11 already in a vacuum state by a vacuum transporting robot 7.

The samples are processed in the process chambers 8 to 11, and, aftercompletion of processing, the processed samples are transported to anunload lock chamber 12 by the vacuum transporting robot 7. Similar tothe load lock chamber 6, the unload lock chamber 12 can be switchedbetween the atmospheric state and the vacuum state. By switching theunload lock chamber 12 to the atmospheric state, the samples extractedfrom the unload lock chamber 12 by the atmospheric transporting robot 4are returned to the sample cassettes 1 to 3.

The series of process described above is controlled by an apparatuscontrol means 15 composed of a microcomputer through an input/outputprocessing means 14. The apparatus control means 15 comprises a CPU, amemory such as a RAM, a ROM or the like, an external memory means, aninput/output control means, an input/output means and so on. Theapparatus control means 15 controls operation of the vacuum processapparatus based on programs and commands pre-stored in the ROM and thelike, various kinds of data stored in the memory, and information fromvarious kinds of sensors and counters sensing the state of the vacuumprocess apparatus.

An operating procedure input means 16, such as a personal computer, isconnected to the apparatus control means 15, and the programs andcommands for executing various kinds of vacuum processing and variouskinds of data are input to the apparatus control means 15, and recordedand stored in the memories such as the RAM, the ROM and the externalmemory unit.

FIG. 2 shows an example of the functional structure of the apparatuscontrol means 15 described above. The apparatus control means 15comprises a transporting and processing time measuring means 300 forcalculating by measuring time periods of transporting a sample in thevacuum process apparatus and time periods of processing a sample in theprocess chamber, that is, a time period of sample loading to and a timeperiod of sample unloading from each of the process chambers and asample processing time period; a sample processing waiting timeestimating means 400 for calculating and estimating a time period untilcompletion of preparation to start processing of a newly loaded sampleusing the time period of sample loading and the time period of sampleunloading and the sample processing time period described above; asample processing order determining means 500 having a function todetermine the next extracting order of the samples from the cassettesbased on data indicating the transporting and the processing timeperiods and the waiting time period obtained above; and a sampletransporting and processing control means 600 having a function tocontrol the overall vacuum process apparatus so as to process andtransport the samples based on the result determined by the sampleprocessing order determining means 500.

The time period, from the time of loading a new sample until completionof loading the new sample into each of the process chambers, can beobtained by calculating a time period until the new sample is ready tobe loaded into the process chamber, taking into consideration theremaining time period of sample processing under way now, the timeperiod needed for unloading the processed sample, and the time periodduring which the processed sample must wait to be extracted due to theextraction of another sample to be transported, depending on thestructure of the apparatus.

Procedures for loading and processing of samples in accordance with thepresent invention will be described below with reference to FIG. 3 toFIG. 5.

Initially, the transporting and processing time measuring means 300 willbe described. It is assumed that the transporting and processing timemeasuring means 300 calculates in the case where sample processing isperformed in the first process chamber 8 for the sample cassette 1 andthe third process chamber 10 for the sample cassette in parallel. Thetime period until completion of preparation to the start of processingof a next sample in the first process chamber 8 is T1, and the timeperiod until completion of preparation to the start of processing of anext sample in the third process chamber 10 is T2.

Letting the total time period needed for processing the sample under wayin the process chamber 8 be Te1 and the elapsed time period of theprocessing in the process chamber 8 be Tz1, the remaining time periodTn1 of processing in the process chamber 8 can be calculated from thefollowing equation.Tn1=Te1−Tz1Similarly, the remaining time period Tn2 of processing in the processchamber 9 can be calculated from the following equation.Tn2=Te2−Tz2

The time period required for processing one sample in the processchamber can be obtained by measuring and storing a time period from thebeginning to the completion of the sample processing previouslyexecuted. The time period required for processing the first sample canbe obtained by referring to data on sample processing previouslyexecuted using another sample cassette. However, if there is no data onthe measured processing time period because processing has never beenexecuted before, the time period required for processing the firstsample is obtained by performing a calculation taking time period datain processing data for performing sample processing into consideration.

The time period calculation described above will be described withreference to the flowchart of FIG. 3(A) and FIG. 3(B). The processingshown in this flowchart is a cyclic processing executed every 0.1 secondand is used for required time calculation processing to judge thewaiting time estimating processing described above by always measuring atime period of each transporting processing and a sample processing timeperiod in each of the process chambers.

Initially, it is judged whether or not transporting of the sample fromthe load lock chamber 6 to the process chamber 8 is under way (Step302). If the transporting of the sample from the load lock chamber 6 tothe process chamber 8 is under way, the transporting time from the loadlock chamber 6 to the process chamber 8 is counted (Step 304).

Next, it is judged whether or not transporting of a sample from theprocess chamber 8 to the process chamber 9 is under way (Step 306). Iftransporting of a sample from the process chamber 8 to the processchamber 9 is under way, the transporting time from the process chamber 8to the process chamber 9 is counted (Step 308).

Further, it is judged whether or not transporting of a sample from theload lock chamber 6 to the process chamber 10 is under way (Step 310).If transporting of the sample from the load lock chamber 6 to theprocess chamber 10 is under way, the transporting time from the loadlock chamber 6 to the process chamber 10 is counted (Step 312).

Further, it is judged whether or not transporting of a sample from theprocess chamber 10 to the process chamber 11 is under way (Step 314). Iftransporting of the sample from the process chamber 10 to the processchamber 11 is under way, the transporting time from the process chamber10 to the process chamber 11 is counted (Step 316).

Next, it is judged whether or not transporting of the sample from theprocess chamber 9 to the unload lock chamber 12 is under way (Step 318).If transporting of the sample from the process chamber 9 to the unloadlock chamber 12 is under way, the transporting time from the processchamber 9 to the unload lock chamber 12 is counted (Step 320).

Further, it is judged whether or not transporting of the sample from theprocess chamber 11 to the unload lock chamber 12 is under way (Step322). If transporting of the sample from the process chamber 11 to theunload lock chamber 122 is under way, the transporting time from theprocess chamber 11 to the unload lock chamber 12 is counted (Step 324).

Next, it is judged whether or not processing of the sample is under wayin the process chamber 8 (Step 326). If processing of the sample isunder way in the process chamber 8, the sample processing time in theprocess chamber 8 is counted (Step 328).

Similarly, it is judged whether or not processing of the sample is underway in each of the process chambers 9 to 11 (Step 330 to Step 338). Ifprocessing of the sample is under way in a process chamber, the sampleprocessing time in each of the process chambers is counted (Step 332 toStep 340).

The sample processing waiting time estimating means 400 and the sampleprocessing order determining means 500 will be described. The waitingtime period estimating processing for calculating a required time periodto start processing in each of the process chambers 8 to 11 when a nextsample is loaded in the process chamber, and transportation of each ofthe samples is started based on the calculated result.

For a sample processing under way now, the elapsed time period can beobtained by referring to time data of a program for measuring theprocessing time of the process chamber. Further, a calculation isexecuted by adding a time period Tout1, which is necessary for unloadingthe sample from the process chamber 8 after completing sample processingin the process chamber 8, a time period Tin1, which is necessary forloading a new sample in the process chamber 8 and a remaining timeperiod Tn1 for processing the sample.

From the above, the time period T1 until completion of preparation tothe start of processing of the new sample in the process chamber 8 canbe obtained from the following equation.T 1=Tn1+Tout1+Tin1Similarly, the time period T2 for the process chamber 9 can be obtainedfrom the following equation.T 2=Tn2+Tout2+Tin2

FIGS. 4(A) and 4(B) constitute a flowchart of the waiting timeestimation processing which calculates a required time period untilstarting of processing in each of the process chambers 8 to 11 describedabove. Referring to FIG. 4(A), it is judged whether or not processing inthe process chamber 8 is under way (Step 401). In a case where theprocessing in the process chamber 8 is under way, assuming that thesample to be extracted next is in the sample cassette 1, a time period(T1) until processing of this sample ready for starting in the processchamber 8 is calculated from the following equation (Step 402).T 1=remaining processing time in the process chamber 8(Tn1)+transporting time from the process chamber 8 to the processchamber 9 (Tout1)+loading time from the load lock chamber 6 to theprocess chamber 8 (Tin1)

Next, it is judged whether or not the sample of the sample cassette 1 isin the load lock chamber 6 (Step 404).

In a case where the sample of the sample cassette 1 is in the load lockchamber 6, assuming that the sample to be extracted next is in thesample cassette 1, a time period (T1) until processing of this sampleready for starting in the process chamber 8 is calculated from thefollowing equation (Step 406).T 1=T 1+processing time in the process chamber 8 (Te1)+transporting timefrom the process chamber 8 to the process chamber 9 (Tout1)+loading timefrom the load lock chamber 6 to the process chamber 8 (Tin1)

Next, it is judged whether or not the sample of the sample cassette 1 isin the orientation flat adjusting unit 5 (Step 408).

In a case where the sample of the sample cassette 1 is in theorientation flat adjusting unit 5, assuming that the sample to beextracted next is the sample cassette 1, a time period (T1) untilprocessing of this sample ready for starting in the process chamber 8 iscalculated from the following equation (Step 410).T 1=T 1+processing time in the process chamber 8 (Te1)+transporting timefrom the process chamber 8 to the process chamber 9 (Tout1)+loading timefrom the load lock chamber 6 to the process chamber 8 (Tin1)

Further, it is judged whether or not processing in the process chamber10 is under way (Step 4121).

In a case where the processing in the process chamber 10 is under way,assuming that the sample to be extracted next is in the sample cassette2, a time period (T2) until processing of this sample ready for startingin the process chamber 10 is calculated from the following equation(Step 414).T 2=remaining processing time in the process chamber 10(Tn2)+transporting time from the process chamber 10 to the processchamber 11 (Tout2)+loading time from the load lock chamber 6 to theprocess chamber 10 (Tin2)

Next, it is judged whether or not the sample of the sample cassette 2 isin the load lock chamber 6 (Step 416).

In a case where the sample of the sample cassette 2 is in the load lockchamber 6, assuming that the sample to be extracted next is in thesample cassette 2, a time period (T2) until processing of this sampleready for starting in the process chamber 10 is calculated from thefollowing equation (Step 418).T 2=T 2+processing time in the process chamber 10 (Te2)+transportingtime from the process chamber 10 to the process chamber 11(Tout2)+loading time from the load lock chamber 6 to the process chamber10 (Tin2)

Next, it is judged whether or not the sample of the sample cassette 1 isin the orientation flat adjusting unit 5 (Step 420).

In a case where the sample of the sample cassette 1 is in theorientation flat adjusting unit 5, assuming that the sample to beextracted next is in the sample cassette 1, a time period (T2) untilprocessing of this sample ready for starting in the process chamber 10is calculated from the following equation (Step 422).T 2=T 2+processing time in the process chamber 10 (Te2)+transportingtime from the process chamber 10 to the process chamber 11(Tout2)+loading time from the load lock chamber 6 to the process chamber10 (Tin2)

In a case where a waiting time period for sample transportation occursdue to the construction of the apparatus, it is judged in taking sampletransporting order protocol into consideration whether or not thewaiting time period occurs. If the waiting time period occurs, thewaiting time period can be obtained by calculating another transportingtime period and another sample processing time period which in the causeof the waiting time period. By adding all the time periods obtained intaking these into consideration, the time period until completion of thepreparation of performing the next sample processing in the processchamber can be calculated.

Next, the time period until starting to process the sample of the samplecassette 1 (T1) is compared with the time period until starting toprocess the sample of the sample cassette 2 (T2) (Step 424). If the timeperiod until starting to process the sample of the sample cassette 1(T1) is smaller, the sample is extracted from the sample cassette 1 tostart transporting the sample to the orientation flat adjusting unit(Step 426). On the contrary, if the time period until starting toprocess the sample of the sample cassette 2 (T2) is smaller, the sampleis started to be extracted from the sample cassette 2 (Step 428).

By comparing T1 and T2 obtained from calculation as described above, thesample is extracted from the sample cassette 1 to be transported to theload lock chamber when T1≦T2, and the sample is extracted from thesample cassette 2 to be transported to the load lock chamber when T1>T2.

In the above description of the embodiment, the order in which thesamples are extracted is determined using time periods measured justbefore processes are executed, as they are. However, the order ofextraction of the samples may be determined using averaged values ofmeasured time periods obtained in the past.

In this case, the order of extraction of the samples can be determinedsimilarly to the above-mentioned processing by replacing the loading,the transporting and the processing time periods described above withtime periods obtained by processing to obtain average values using dataaccumulated in a required time calculation data area, as will bedescribed later with reference to FIG. 5. The reason why the averagevalues are used is that there are variations in the loading, thetransporting and the processing time periods, and accordingly the sampleprocessing efficiency per unit time of the overall vacuum processapparatus can be improved by using the average values.

Sequences of processing and transportation of the sample will bedescribed with reference to FIG. 5(A), which shows a transportingsequence from the load lock chamber 6 to the process chamber 8. A sampletransporting count timer value is cleared, and a flag of “transportationunder way from the load lock chamber to the process chamber 1” is set(Step 502).

Next, the sequence of sample transportation is executed (Step 504).Next, the flag of “transportation under way from the load lock chamberto the process chamber 1” is cleared (Step 506). Further, the value ofthe transporting count timer is stored in the required time calculationdata area (Tin1) (Step 508).

FIG. 5(B) shows a sample processing sequence in the process chamber 8.Initially, a sample transporting count timer value is cleared, and aflag of “sample processing under way in the process chamber 8” is set(Step 512). Next, the sequence of sample processing is executed (Step514).

Next, the flag of “sample processing under way in the process chamber 8”is cleared (Step 516). Further, the value of the sample processing counttimer is stored in the required time calculation data area (Te1) (Step518).

The time periods required for loading and unloading samples are measuredevery time transporting processing is performed, and the time data isstored. By doing so, the time data can be stored by measuring thetransporting process time periods from the beginning of a starting-upstage accompanied by installation of the vacuum process apparatus.Therefore, since the data is always accumulated at the start of thesample processing, the problem of lack of data never occurs.

The effects of the embodiment in accordance with the present inventionwill be described with reference to FIG. 6 and FIG. 7. Here, discussionwill be made of a process in which the processing in the process chamber10 among the four process chambers 8 to 11 takes a longer time than theprocessing in the other process chambers. FIG. 6 is a chart showingtiming of the sample processing based on the order of sample loading inaccordance with the present invention. When the samples are loaded fromthe two sample cassettes 1, 2 to the process chambers, useless waitingtime periods hardly occur.

On the other hand, FIG. 7 is a chart showing timing of sample processingbased on the order of sample loading in a conventional method. Even ifthe samples are loaded to the process chambers so that numbers ofsamples extracted from the two sample cassettes 1, 2 become equal toeach other, long waiting time periods occur in loading and unloading ofthe samples to and from the process chamber 10 because there aredifferences in the processing time periods between the process chamber10 and the other process chambers.

It can be understood from the comparison between FIG. 6 and FIG. 7 thatthe vacuum process apparatus according to the present invention clearlyhas an effect to improve the sample processing efficiency, because aprocess chamber series which has a fast processing time can process asecond sample and a third sample, while a process chamber series whichhas a slow processing time is processing a first sample.

1. A vacuum process apparatus comprising: a plurality of cassettes forholding samples under atmospheric atmosphere; a plurality of vacuumprocess chambers connected to vacuum transporting chamber each forprocessing said samples one by one; evacuation means for evacuating saidvacuum process chambers under reduced pressure; a plurality of chamberscapable of being changed over between an atmospheric atmosphere and avacuum atmosphere communicating with said vacuum transporting chamber;atmospheric transporting means for transporting said samples between onechamber of said plurality of chambers capable of being changed over andone cassette of said plurality of cassettes; a vacuum transporting meansarranged in said transporting chamber for transporting said samplesamong one chamber of said plurality of chambers capable of being changedover and said plurality of vacuum process chambers; and apparatuscontrol means for controlling transporting and processing of saidsamples; wherein said apparatus control means measures a transportingtime of said samples and a processing at each of said vacuum processchambers and then determines sequence for taking out said samples fromsaid plurality of cassettes in response to said measured times.
 2. Thevacuum process apparatus according to claim 1, wherein the samples areprocessed in parallel in a series of one-to-one correspondence betweeneach of said sample cassettes and each of said vacuum process chambers,the samples are taken out of the cassettes corresponding to the processchamber series having completed at the earliest possible time apreparation for starting newly the sample process at the processchamber, and loaded into the process chamber.
 3. A vacuum processapparatus comprising: a plurality of sample cassettes for holdingsamples under atmospheric atmosphere; a plurality of vacuum processchambers connected to a vacuum transporting chamber each for processingsaid samples one by one; evacuation means for evacuating said vacuumprocess chambers under reduced pressure; a plurality of chambers capableof being changed over between an atmospheric atmosphere and a vacuumatmosphere communicating with said vacuum transporting chambers;atmospheric transporting means for transporting said samples between onechamber of said plurality of chambers capable of being changed over andone of said plurality of cassettes; a vacuum transporting means arrangedin said transporting chamber for transporting said samples among onechamber of said plurality of chambers capable of being changed over andsaid plurality of vacuum process chambers; and apparatus control meansfor controlling transporting and processing of said samples; whereineach of said sample cassettes and each of said vacuum process chambersare set in a series of one-to-one vacuum processing chambers, thesamples being processed in parallel for every series of vacuum processchambers; and wherein said apparatus control means calculates a timeranging from one of a sample loading time, a sample unloading time foreach of the vacuum process chambers and a sample process time until acompletion of preparation of starting a process for a sample newlyloaded, estimates the vacuum process chamber with the shortest time, andloads the samples from the cassette corresponding to the estimatedvacuum process chamber to said vacuum process chamber.
 4. A method foroperating a vacuum process apparatus comprising a plurality of cassettesfor holding samples under atmospheric atmosphere; a plurality of vacuumprocess chambers connected to a vacuum transporting chamber each forprocessing the samples one by one; evacuation means for evacuating thevacuum process chambers under reduced pressure; a plurality of chamberscapable of being changed over between an atmospheric atmosphere and avacuum atmosphere communicating with the vacuum transporting chamber;atmospheric transporting means for transporting said samples between onechamber of the plurality of chambers capable of being changed over andone cassette of the plurality of cassettes; a vacuum transporting meansarranged in the transporting chamber for transporting the samples amongan optional chamber of the plurality of chambers capable of beingchanged over and the plurality of vacuum process chambers; the methodcomprising the steps of: controlling transporting and processing of thesamples; measuring a loading time, an unloading time of the samples toor from each of the vacuum process chambers, or a process time for thesamples; and determining a sequence for taking out the samples from theplurality of cassettes is in response to the measured times.
 5. A methodfor operating a vacuum process apparatus comprising a plurality ofcassettes for holding samples under atmospheric atmosphere; a pluralityof vacuum process chambers connected to a vacuum transporting chambereach for processing the samples one by one; evacuation means forevacuating the vacuum process chambers under reduced pressure; aplurality of chambers capable of being changed over between anatmospheric atmosphere and a vacuum atmosphere communicating with thevacuum transporting chamber; atmospheric transporting means fortransporting the samples between one chamber of the plurality ofchambers capable of being changed over and one cassette of the pluralityof cassettes; a vacuum transporting means arranged in the transportingchamber for transporting the samples among one chamber of the pluralityof chambers capable of being changed over and the plurality of vacuumprocess chambers; the method comprising the steps of: controllingtransporting and processing of the samples; setting each of the samplecassettes and each of the vacuum process chambers in a series ofone-to-one vacuum processing chambers, and processing the samples inparallel for every series of vacuum process chambers; and when adecision is made from what type of cassette the samples are loaded,taking out the samples from the cassettes corresponding to a series ofthe vacuum process chambers in which a preparation for starting aprocess of a new sample is completed at the earliest time, andtransporting the selected samples to the corresponding vacuum processchamber.